Rau cov khoom siv semiconductor siab heev, txhua qhov tom qab ua tiav, qhov saum npoo ntawm silicon wafer yuav ntau dua los yog tsawg dua qhov muaj cov kab mob sib kis, hlau residues lossis organic residues, thiab lwm yam. ntaus ntawv qauv ntawm cov complexity ntawm lub semiconductor ntaus ntawv nyob rau hauv ib tug particle contamination, impurity concentration thiab tus naj npawb ntawm ntau thiab ntau rhiab heev.
Nyob rau ntawm lub ntsej muag silicon wafer rau saum npoo ntawm cov pa phem ntawm kev siv tshuab ntxhua khaub ncaws ua rau muaj kev xav tau ntau dua, lub ntsiab lus tseem ceeb yog kom kov yeej cov pa phem ntawm micro-particles thiab cov substrate ntawm cov adsorption zoo, ntau lub tuam txhab semiconductor ntawm txoj kev tu tam sim no yog acid ntxuav, phau ntawv so, tsis hais txog qhov ua tau zoo ntawm qhov qeeb, tab sis kuj ua rau cov pa phem thib ob. Hom kev tu dab tsi zoo dua rau kev tu cov khoom siv semiconductor? Laser tu yog tam sim no tsim nyog rau ib txoj kev, thaum lub laser scan yav dhau los, cov ntaub ntawv saum npoo av raug tshem tawm, thiab rau qhov sib txawv ntawm cov av yuav yooj yim tshem tawm, yuav tsis khawb qhov saum npoo ntawm cov khoom, thiab yuav tsis ua rau lwm yam. kev ua qias tuaj, yog qhov kev xaiv zoo.
Nrog rau cov khoom siv hluav taws xob sib xyaw ua ke txuas ntxiv zuj zus, cov txheej txheem ntxuav ntawm cov khoom poob thiab qhov roughness tau dhau los ua ib qho yuav tsum muaj kev txhawj xeeb, cov khoom yuav raug tshem tawm yam tsis muaj cov khoom poob thiab cov duab puas yog qhov tseem ceeb tshaj plaws, laser tu tshuab tsis muaj kev sib cuag, tsis muaj cov nyhuv thermal, yuav tsis tsim kev puas tsuaj rau qhov khoom yuav tsum tau ntxuav, thiab yuav tsis tsim cov kab mob thib ob ntawm cov txheej txheem tu ib txwm tsis tuaj yeem muab piv rau qhov zoo ntawm kev daws rau qhov Nws yog txoj kev tu zoo tshaj plaws los daws cov pa phem. Cov khoom siv semiconductor.
