Laser tu thiab pleev xim daim ntawv thov tau txais kev mloog ntau nyob rau hauv xyoo tas los no, raws li ib txwm siv cov xim tshem tawm txoj kev xws li sandblasting thiab tshuaj pleev xim stripping tsim ib tug ntau ntawm cov pa phem. Nws yog lub sijhawm los coj kom zoo dua cov xim ntsuab tshem tawm cov kev daws teeb meem. Los ntawm kev tswj hwm kom zoo xws li pulse dav, lub zog ua haujlwm, thiab tshem tawm cov kev ua haujlwm loj thiab cov txiaj ntsig ntawm laser xim tshem tawm tuaj yeem yog sau ua raws li hauv qab no:
● Cov khoom siv tsawg dua
● Tsawg dua lwm qhov pov tseg
● Tsis muaj kev puas tsuaj rau lub substrate siv cov kev tswj laser
● Zoo dua adhesion vim txo qhov roughness
● nrawm dua li cov txheej txheem ib txwm muaj
● Muaj txiaj ntsig ntau dua li cov txheej txheem ib txwm muaj
Muaj ob txoj hauv kev kom ua tiav laser tu. Qhov thib ib yog laser ablation, qhov twg lub zog siab pulse los yog lub zog nruam nthwv dej yuav ua rau muaj cov ntshav hauv cov txheej txheem, thiab cov plasma poob siab yuav ua rau cov txheej txheem tawg. Qhov thib ob yog thermal decomposition, qhov twg qis-zog nruam nthwv dej beam lossis ntev mem tes tuaj yeem ua kom sov rau saum npoo thiab thaum kawg evaporate txheej. Ob lub tshuab no tau qhia hauv Daim duab 1 thiab 2.
Daim duab 1 Laser ablation cov kauj ruam
Daim duab 2 Thermal decomposition kauj ruam
Txawm li cas los xij, tsis muaj kev tswj hwm lub tshuab laser tuaj yeem ua rau lub substrate puas thiab ua rau muaj teeb meem. Ob leeg nruam thiab mem tes lasers yuav siv tau rau laser tu, tab sis nws yog ib qho tseem ceeb kom nkag siab txog qhov txawv cov teebmeem no lasers tsim nyob rau hauv sib txawv substrates. Kev nqus ntawm lub laser txuas ntxiv los ntawm lub substrate nyob ntawm nws lub wavelength, nrog luv wavelengths feem ntau ua rau kev nqus ntau dua. Rau ib tug classical pulsed laser, ntawm qhov tod tes, qhov tob tob LT rau hauv lub substrate yog ywj siab ntawm lub wavelength thiab nyob ntawm seb lub mem tes dav τp ntawm lub laser thiab diffusivity D ntawm lub substrate, raws li qhia nyob rau hauv Equation 1.
Rau ib tug classical pulsed laser, ib tug nce nyob rau hauv mem tes dav tsub kom lub ablation pib, uas yog txhais raws li qhov tsawg kawg nkaus lub zog yuav tsum tau tshem tawm ib chav tsev ntim ntawm cov khoom raws li cov nram qab no kab zauv:
qhov twg ρ yog qhov ceev thiab Hv yog qhov cua sov ntawm vaporization (cov cua sov yuav tsum tau vaporize ib chav tsev ntawm cov khoom hauv Joules ib gram). Yog li, ntev pulses txo cov ablation efficiency. Classical pulsed lasers kuj nyob ntawm seb tus mem tes repetition npaum li cas, nrog lub ablation efficiency nce raws li tus nqi repetition nce.
Ib txoj kev tshawb fawb tau tshawb xyuas CW thiab kev ua haujlwm ntawm lub tshuab laser siv 1.07 μm fiber ntau laser [Ref 2]. Hauv txoj kev tshawb no, tib lub laser txuas ntxiv tau qhib thiab tawm los tsim cov pulses ntev. Txoj kev tshawb no pom tias hauv CW hom, lub zog tshwj xeeb (txhais tau tias yog lub zog yuav tsum tau tshem tawm ib chav ntim ntawm cov khoom (mm3) hauv Joules thiab inversely proportional to the ablation efficiency) txo qis nrog nce scan ceev thiab laser zog. Rau hom mem tes, qhov kev ua haujlwm ablation tau pom tias yog nyob ntawm lub luag haujlwm lub voj voog (qhov sib piv ntawm lub plawv dhia mus rau lub sijhawm luv ntawm ob lub pulses). Ua kom lub luag haujlwm lub voj voog, qhov ablation efficiency nce. Qhov no yog qhov sib piv rau classical pulsed lasers, qhov twg, ntawm qhov kev rov ua kom ruaj khov, ua rau lub plawv dhia dav (thiab yog li lub voj voog lub luag haujlwm) txo qis kev ua haujlwm ablation. Daim duab 3 muab piv rau lub zog tshwj xeeb piv rau lub zog thiab kev ntsuas nrawm rau 1 kHz CW laser thiab lub laser pulsed (piv txwv li, CW laser tig rau thiab tawm) ntawm cov hlau stainless substrate.
Daim duab 3: Sab laug zaj duab xis qhia lub CW laser tshwj xeeb zog piv rau laser zog, thiab txoj cai zajlus qhia 1 kHz mem tes tshwj xeeb zog piv rau laser lub voj voog
Lub zog siab tshaj plaws ntawm lub tshuab laser (piv txwv li, CW laser uas hloov mus rau thiab tawm) yog 1800 W, thiab nws lub zog nruab nrab yuav luag zoo ib yam li CW laser, tab sis raws li tau pom los ntawm daim duab, lub zog tshwj xeeb yog yuav luag 2. lub sij hawm qis. Pulsed hom piv rau CW hom. CW hom zoo li muaj kev poob ntau dua piv rau hom mem tes vim tias nws lub zog laser ib txwm nyob ntawm qhov kawg.
Txawm li cas los xij, hom kev ua haujlwm ntawm lub laser tsis yog tib qho kev txiav txim siab seb puas yuav siv lub tshuab hluav taws xob (piv txwv li, nruam nthwv dej hloov mus rau thiab tawm) lossis lub tshuab hluav taws xob txuas ntxiv rau laser tu. Hom scanning kuj yog lwm qhov tseem ceeb uas yuav tsum tau xav txog. Nws yog ib qho tseem ceeb uas lub sij hawm sib cuam tshuam ntawm cov nqaj laser thiab txheej yog luv kom cov nyhuv
ntawm thermal puas yog tsawg heev. Qhov no tuaj yeem ua tiav los ntawm kev siv cov pulses luv luv nrog kev siv lub ncov siab lossis siv lub laser txuas ntxiv thiab nrawm nrawm nrawm.
Xav txog tias lub zog laser txuas ntxiv yog feem ntau muaj zog dua, pheej yig dua, thiab rugged ntau dua li cov lasers pulsed, nws tsis yog ib qho kev xaiv phem rau kev tu laser. Hmoov tsis zoo, cov galvanometer scanners ib txwm siv rau kev ntxuav laser tsis tuaj yeem tuav ntau-kilowatt lasers. Galvanometer scanners siv rau high-power lasers kuj hnyav heev thiab tsis tuaj yeem ua haujlwm ntawm kev soj ntsuam ceev. Yog li ntawd, ib hom tshiab ntawm scanner hu ua polygon scanner tau thov uas tsuas muaj ib qho txav mus, lub polygon [Ref 3]. Cov tshuab luam ntawv polygon no muaj peev xwm tuav tau lub zog laser ntau dua thiab tau ua kom pom tias peb zaug sai dua li galvanometer scanners. Siv cov kev sib hloov ceev ceev, cov tshuab luam ntawv polygon tuaj yeem tsim qhov nrawm nrawm dua li 50 meters ib ob. Qhov kev soj ntsuam siab ceev no tso cai rau lub sijhawm sib cuam tshuam ntawm cov nqaj nrog rau qhov chaw ua haujlwm kom luv thiab tso cai rau siv lub zog laser siab heev. Figuygon scanner.
Hauv cov ntsiab lus, kev xaiv ntawm kev siv CW lossis laser pulse (xws li CW lossis classical luv-mem tes lasers uas tau hloov thiab tawm) rau kev ntxuav laser nyob ntawm ntau yam, xws li hom substrate, nqus ntawm txheej thiab kos duab laser. Kev sib xyaw ua ke ntawm lub tshuab luam ntawv polygon thiab lub laser txuas ntxiv ua kom nrawm nrawm nrawm thiab yog qhov kev xaiv pheej hmoo los txiav txim siab thaum classical pulsed lasers tsis muaj.
